05.20.25聽 |聽 8:30am-4:30pm聽 |聽 001 Engineering Science Building
Lunch break from 12:20-1:40
Join us for a hand-on workshop on thin film deposition using the Angstrom Multimode and Angstrom Resistive deposition systems in the VINSE cleanroom.聽 The session will be led by Mike Miller, Ph.D., Director of Business Development at Angstrom Engineering.聽聽Attendees will develop a deeper understanding of how to control deposition parameters, improve film quality, and address common fabrication challenges.
In addition to the technical training, participants will have the opportunity for interactive Q&A sessions and a chance to receive tailored guidance on specific research projects, discuss unique deposition challenges, and explore innovative solutions.
Workshop is free, lunch will be provided. Register required.
Instructor:聽 Mike Miller, Ph.D.
Director of Business Development | Angstrom Engineering Inc.
Course Outline
- Introduction to PVD and vacuum coating science
- PVD source selection 鈥� mechanism of operation; benefits and limitations
- High vacuum pumps 鈥� mechanism of operation; benefits and limitations
- Gas flow and pressure management
- Substrate fixturing 鈥� motion, heating/cooling, ion/bias assistance
- Mechanical, electrical, and optical properties of thin films
- Process parameters that affect film properties
- Gauge and instrument calibration
- Substrate preparation and cleaning
- Detection of contamination
- Introduction to surface analysis techniques (Auger, ESCA, SIMS, FTIR)
- Measurement of film stress
- Statistical process control